All-strong-condition ultraviolet lasers happen to be widely Employed in the fields of mechanical flaw detection, lithography, micromachining and drugs for the advantages of modest quantity, lengthy life, higher effectiveness, fantastic beam good quality, huge tuning and narrow spectral line, etcetera. Utilizing high ability near-infrared coherent light resource as the fundamental frequency supply according to nonlinear tuning know-how, making ultraviolet coherent radiation by multistage frequency conversion is considered to be an essential strategy to produce the ultraviolet coherent gentle source.
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We summarized The existing enhancement status of the higher-electric power DUV laser both for the wavelength of FHG of the one-μm laser and at 193 nm. The modern development of your stable-point out/fiber laser, and also the nonlinear optical crystals, prompts not simply the average electrical power but in addition the beam good quality (coherence) in the DUV lasers to an unprecedented stage.
The crucial element challenge of ultraviolet coherent mild resource primarily focuses on the development of nonlinear optical frequency conversion crystal in ultraviolet band. The nonlinear optical crystal is probably the ailments for frequency transformation, so The expansion, measurement, hurt resistance, conversion effectiveness and allowable parameter variety of nonlinear optical crystal are needed more and more.
Conversely, the beam quality of this bigger electrical power DUV laser would become worse resulting from extra significant thermal and nonlinear outcomes. As a result, the frequency conversion processes ought to be thoroughly designed to mitigate the aforementioned effects. Hence, a substantial-electric power DUV laser within the FHG of one μm with a very good beam quality might be obtained and may be valuable for acquiring the shorter wavelength DUV lasers for instance 193 nm by SFG.
Both the 1040 nm and 1078 nm laser originate from one particular dual-wavelength Yb-doped fiber laser. Every laser is amplified by levels of fiber amplifier and Yb-doped elements amplifier, respectively.
On the other aspect, the ability scaling from the NIR laser is another component to improve the regular energy of the 193-nm DUV laser. Mainly because of the more info deficiency of the higher-ability amplification Resolution from the NIR laser (one example is at 1553 nm), nonlinear frequency processes for example optical parameter oscillation (OPO) could be placed on build a wavelength converter by shifting the wavelength from 1 μm to the specified wavelength as well as acquiring relative better power [21]. Just lately, a diamond Raman laser confirmed its ability in attaining a significant ability along with a large conversion performance in the 1st Stokes in the 1-μm laser [22,23], which implies the possibility to become applied within the 193-nm DUV laser generation because of its high Raman gain and enormous frequency change.
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Cesium Lithium Borate (CsLiB6O10 or CLBO) is the best non-linear crystal which generates ultraviolet harmonics on the Nd:YAG basic laser wavelength. As a way to boost the injury threshold, reduced CLBO surface roughness, by extremely-precision machining, is required. As the CLBO crystal has quick hydroscopic reaction and micro scratches in machining, ultra-exact machining in the CLBO crystal is really a difficult complex difficulty.
Tunable ultraviolet laser supply based upon good-condition dye laser know-how and CsLiB6O10 harmonic era
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The event from the 193-nm laser was shown by levels of SFG. In an effort to scale the DUV laser power properly, a new idea with the 193-nm DUV laser generation is presented determined by the diamond Raman laser.